| 摘要 |
In a sensor head, parallel rays or approximately parallel rays are generated by a pair of condenser lenses that reciprocate according to vibrations of a collimate lens and a tuning fork, and go out from a light port. To the light port, a lens holder in which an objective lens is supported is detachably attached. The light from the light port is processed to measurement beams that are condensed by the objective lens to a predetermined position.
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