发明名称 Method for producing an integrated circuit assembly with an auxiliary indentation, particularly with aligning marks, and an integrated circuit arrangement
摘要 A method is disclosed for producing an integrated circuit arrangement with an auxiliary indentation, particularly with aligning marks, and an integrated circuit arrangement. The invention also relates to a method for producing aligning marks. During the method, a planarization is carried out before material is removed from an auxiliary indentation.
申请公布号 US2007102819(A1) 申请公布日期 2007.05.10
申请号 US20060527736 申请日期 2006.09.25
申请人 GOLLER KLAUS;HEITZSCH OLAF;NICHTERWITZ MARION 发明人 GOLLER KLAUS;HEITZSCH OLAF;NICHTERWITZ MARION
分类号 H01L23/544;G03F9/00;H01L21/4763 主分类号 H01L23/544
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