Particle analysis system used in the production of dirt-sensitive components or products comprises an optical imaging device, an illuminating device, a polarization arrangement, a positioning device and an evaluation device

摘要

Particle analysis system comprises an optical imaging device (1, 2) for imaging a particle collection on a planar substrate (9), an illuminating device (5) for illuminating a part of the particle collection, a polarization arrangement with an optical polarizer (6) and an optical analyzer (12), a positioning device for displacing an illuminated measuring surface (15) of the particle collection and an evaluation device (3) for obtaining and evaluating imaging data produced by the imaging device on the measuring surface. The polarization arrangement has an electrical adjusting unit (13) for adjusting the polarizer and the analyzer relative to each other. An independent claim is also included for a particle analysis method using the above system. Preferred Features:.