| 摘要 |
The present invention provides probes of a probe card and the method of making the same, which is easier to control the size and hardness of each probe and provides the probes with well strength, hardness and electric property. The probe has a main member with a suspended arm, at least one conductive layer on the suspended arm and a dielectric layer between the conductive layer and the suspended arm. The conductive layer(s) is/are stacked on the suspended arm of the main member by electrocasting process and grinded to control the total thickness of the suspended arm.
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