| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an apparatus for processing a substrate in order to fabricate a device having a desired performance. <P>SOLUTION: The apparatus T for processing the substrate is equipped with a device 60 generating a flexure traveling wave for moving a foreign matter adhering to a substrate P for fabricating a device. <P>COPYRIGHT: (C)2007,JPO&INPIT |
