| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a pellicle with an adhesive layer exhibiting superior holding performance to stick suspended solids such as dust and having light resistance to short-wavelength light such as excimer light on the inside of a pellicle frame. SOLUTION: The pellicle has a pellicle frame, a pellicle membrane stretched on the pellicle frame and an adhesive layer disposed on the inside of the pellicle frame. The adhesive layer contains fluororubber such as a 1,1-difluoroethylene- tetrafluoroethylene-propylene copolymer whose number average molecular weight is in the range of 10,000-40,000.</p> |
