| 摘要 |
PROBLEM TO BE SOLVED: To provide an unpacking system which can protect a substrate from scratch and breakage when a laminated body is unpacked to divide a substrate. SOLUTION: The unpacking system 1 is provided with a laminated body 7 on a pallet 10, a substrate transfer device 9 is provided above the laminated body 7 to separate from a substrate 3 from the laminated body 7, and an interleaf paper peeling device 11 is also provided above the laminated body 7 to separate an interleaf paper 5 from the laminated body 7. The substrate transfer device 9 and the interleaf paper peeling device 11 are provided with sensors 12a, 12b and 14 respectively to measure reflectivity just under them. When separating the substrate 3 and the rolled paper 5 from the laminated body 7, the substrate transfer device 9 and the interleaf paper peeling device 11 are alternatively moved onto the laminated body 7 to separate them from the laminated body 7. At this time, it is judged whether or not any laminated body exists on the pallet 10 on the basis of the reflectivity measured by the sensors 12a, 12b and 14. When there is no laminated body, working is stopped. COPYRIGHT: (C)2007,JPO&INPIT
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