| 摘要 |
PROBLEM TO BE SOLVED: To provide an X-ray inspection device with improved inspection accuracy. SOLUTION: When inspecting inspection objects by X-rays, a plurality of X-ray images obtained by irradiating an inspection object article with X-rays and picked up from a plurality of directions are acquired, a three-dimensional image of the inspection object article acquired by executing a reconstruction operation based on the plurality of X-ray images, characteristic quantity indicative of goodness character is calculated, based on the plurality of acquired three-dimensional images, and quality is determined, based on the characteristic quantity. COPYRIGHT: (C)2007,JPO&INPIT
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