| 摘要 |
PROBLEM TO BE SOLVED: To easily and precisely measure the thickness of a coating film, irrespective of the film thickness of the coating film and the dry/wet conditions thereof. SOLUTION: A hollow tubular probe 12 for an eddy current displacement gauge is attached at a bottom face 13 of the body 11, in this noncontact type film thickness gauge 10. A coil 14 is provided at the tip of the probe 12. A laser irradiation part 15 and a laser receiving part 16 for a laser displacement gauge in the inside of the hollow tubular probe 12, on the bottom face 13. An alternating current magnetic field is generated by the coil 14, to induce an eddy current in a metal sheet S. The inductance change of the coil 14 due to the induced eddy current is detected to calculate a distance L2 from the probe 12 up to the metal sheet S. A laser beam is irradiated from the laser irradiation part 15, to detect the laser beam reflected at a surface of the coating film F in the laser receiving part 16. A distance L1 between the laser displacement gauge and the coating film surface, based on the principle of trigonometric survey. The thicknessδof the coating film F is calculated, based on the distance L1 and the distance L2. COPYRIGHT: (C)2007,JPO&INPIT
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