| 摘要 |
PROBLEM TO BE SOLVED: To provide an organic EL display in which poor coverage of a passivation layer is eliminated by reducing fine unevenness, such as foreign substance, projection or the like on the surface of an overcoat layer, thereby preventing an occurrence of display defect etc. due to residual gas and moisture diffused to an organic EL layer, its manufacturing method and its manufacturing apparatus. SOLUTION: In the method of manufacturing the organic EL display, after forming a color conversion filter layers 11 and 12 on a transparent substrate 13 and forming an overcoat layer 14 on the substrate to cover the color conversion filter layer, the surface of the overcoat layer is exposed in steam atmosphere of solvent 20 having property which dissolves the overcoat layer to flatten the surface, and an inorganic passivation layer and an organic EL light emitting element are successively formed on the overcoat layer having the flattened surface. COPYRIGHT: (C)2007,JPO&INPIT
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