| 摘要 |
PROBLEM TO BE SOLVED: To provide a microscope apparatus capable of efficiently measuring an inspection object. SOLUTION: The microscope apparatus 1 includes: an imager 7 for imaging the inspection object 12 through an objective lens 5 of prescribed magnification; a variable magnification optical system 6 for varying the projection magnification of the inspection object image from the objective lens 5 to the imager 7; a controller 8 for controlling the variable magnification optical system 6 and controlling the imager 7 while varying the projection magnification so as to continuously image the inspection object image; an image processor 9 for joining the inspection object images while distorting the inspection object images so that the visual field center part may have the highest projection magnification and the projection magnification becomes lower as it comes closer to the peripheral visual field from the center part, and forming one synthesized image; and a monitor apparatus 10 for displaying the synthesized image. The monitor apparatus 10 is configured to distort respective inspection object images so that the projection magnification may become nearly the same on the vicinity of the joint in the case of joining the inspection object images of different projection magnifications. COPYRIGHT: (C)2007,JPO&INPIT
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