| 摘要 |
PROBLEM TO BE SOLVED: To form single nano-size clusters and to attain the small dispersion of the cluster size, high beam flux and high cluster beam energy. SOLUTION: A cluster forming device for forming nano-size clusters by a laser abrasion method is constituted so that a throat port 31 of a Laval nozzle 13 is connected to a taking-out port 21 of a cluster cell 11 in which the clusters are formed. COPYRIGHT: (C)2007,JPO&INPIT
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