SCANNING NANOJET MICROSCOPE AND THE OPERATION METHOD THEREOF

摘要

The inventive scanning nanojet microscope comprises one or several nozzles for producing an agent scanning jet and a system for collecting a radiation obtained I n the area where the jet contacts an object. The nozzle is embodied in the form of an optical resonator made from a light-transparent capillary into which walls a narrow band light radiation is introduced by means of a lightguide. The capillary length is selected is such a way that it is multiple of the light radiation half-wavelength. The inventive method consists in producing a heterogeneous light pressure on the jet and in carrying out the object three-dimensional scanning, wherein the interruption of the light radiation interrupts the jet and the microscope resolving power is defined by the jet diameter. Said microscope can be used in a scanning jet lithography for controlling a production process in a real-time mode. The microscope makes it possible to non-destructively study dielectrical and biological objects devoide of a current-conducting coating and to monitor a living cell in a real-time scale.