发明名称 |
Modular system for infrared absorption gas analysis comprises light source, first modular gas cell, second modular gas cell, light path, device for adjusting effective length of light path and detector |
摘要 |
<p>A modular system (100) comprises a light source (110), a first modular gas cell (120a) having an inlet side with a first plate and an outlet side with a second plate, a second modular gas cell (120b) proximal to the first modular gas cell and having an inlet side with a third plate and an outlet side with a fourth plate, a light path defined by a part of the first modular gas cell and a part of the second modular gas cell, a device for adjusting the effective length of the light path and a detector (140) for detecting the light beam received by the second modular gas cell. An independent claim is also included for the production of a light path comprising selecting a number of modular gas cells each defining a light path and joining the modular gas cells to prepare a combined light path with an effective length.</p> |
申请公布号 |
DE102006046265(A1) |
申请公布日期 |
2007.05.10 |
申请号 |
DE20061046265 |
申请日期 |
2006.09.28 |
申请人 |
MKS INSTRUMENTS INC. |
发明人 |
KAMLET, LEONARD I;SPARTZ, MARTIN L.;ROSENTHAL, PETER |
分类号 |
G01N21/31;G01N21/33;G01N21/35 |
主分类号 |
G01N21/31 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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