FABRY-PEROT INTERFEROMETRIC MEMS ELECTROMAGNETIC WAVE MODULATOR WITH ZERO-ELECTRIC FIELD

摘要

Systems, methodologies, and other embodiments associated with a micro-electrical-mechanical system (MEMS) Fabry-Perot interferometric device (FPID) are described. Fabricating (700) a MEMS FPID may include fabricating (750) a pixel plate and fabricating (790) a reflector plate so a Fabry-Perot cavity is defined therebetween. Fabrication (700) may include producing (720) a capacitor plate that facilitates electrostatically moving the pixel plate. Fabrication (700) may include producing (740, 770) electrical connections between plates and producing circuitry (780) to control plate voltages to facilitate creating an electrostatic force between plates. The MEMS FPID may include stops fabricated from a conductive material and circuitry for maintaining the stops and plates at an electrical potential that will yield a zero electric field contact event.