发明名称 MULTISPECTRAL ANALYZER
摘要 <p><P>PROBLEM TO BE SOLVED: To provide a multispectral analyzer constituted so as to precisely analyze a treatment fluid in a continuous treatment system in a real time to monitor a manufacturing line with high precision. <P>SOLUTION: The multispectral analyzer 1 is equipped with a light source part 24 having a large number of light sources 24a-24g different in wavelength, a casing 10 having a flow cell 14, which permits a liquid to be measured to flow, formed thereto, a large number of the light emission parts 20 and light detection parts 22 approaching the liquid to be measured in the flow cell 14, a spectroscopic part 28 having spectroscopes 28a-28g for individually diffracting the beams of light with respective wavelengths extracted from the light detection parts 22 spectrally and a control part 32 for operationally controlling the spectral data of the liquid to be measured obtained from the spectroscopes 28a-28g. <P>COPYRIGHT: (C)2007,JPO&INPIT</p>
申请公布号 JP2007113979(A) 申请公布日期 2007.05.10
申请号 JP20050303850 申请日期 2005.10.19
申请人 EBARA CORP 发明人 HONGO AKIHISA;UMEDA ISAO;ABE YUJI;JINBO MAMORU
分类号 G01N21/27;B01J19/00;G01N21/05;G01N21/33;G01N21/35;G01N21/3577;G01N21/3581;G01N21/359;G01N37/00 主分类号 G01N21/27
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