| 摘要 |
PROBLEM TO BE SOLVED: To provide a surface property measuring device for copy-measuring an inclined surface of an object under measurement with high accuracy. SOLUTION: The surface of the object under measurement is copy-measured by a measurement part 210. The measurement part 210 comprises a stylus 211 having a contact part 212 at its end and a measurement force detection means for detecting measurement force in a stylus axis direction when the contact part 212 makes contact with the surface of the object. A movement mechanism relative-moves the measurement part 210 with respect to the surface of the object while keeping measurement force constant. The movement mechanism is equipped with a turning mechanism 400 for making the stylus 211 perpendicular to the surface of the object by turning the measurement part 210 with the contact part 212 used as a turning center. COPYRIGHT: (C)2007,JPO&INPIT
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