| 摘要 |
PROBLEM TO BE SOLVED: To provide a focus ring with resistance to high plasma density. SOLUTION: This focus ring is produced by: adding an organic binder to the powder mixture of yttrium and aluminum to knead and mold; burning at a temperature of≤1,520°C in a hydrogen or inert gas atmosphere so that an unreacted material Y<SB>2</SB>O<SB>3</SB>may be contained in a higher content than that of a reaction product Al<SB>2</SB>O<SB>3</SB>and also yttrium may be contained in the unreacted Y<SB>2</SB>O<SB>3</SB>. COPYRIGHT: (C)2007,JPO&INPIT
|
