SLAB COMPRISING CONSUMABLE MATERIAL

摘要

PROBLEM TO BE SOLVED: To provide a slab comprising a consumable material and provided with at least one detector for a service lifetime end point. SOLUTION: This invention relates to a PVD target structure for use in physical vapor deposition. The PVD target structure comprises a consumable slab of a source material and one or more detectors for indicating when the consumable slab of the source material is approaching or has been reduced to a given quantity corresponding to the service lifetime endpoint of the target structure. COPYRIGHT: (C)2007,JPO&INPIT