发明名称 METHOD FOR PLASMA-TREATING LINEAR OBJECT TO BE TREATED
摘要 <P>PROBLEM TO BE SOLVED: To provide a method for plasma-treating a linear object to be treated, by which the surface of the linearly-continued object to be treated can efficiently be plasma-treated continuously. <P>SOLUTION: The method for plasma-treating the linear object to be treated comprises: a first step of arranging a plasma treatment head 10, which has a substantially slender opening 11, in a straightly-extended part of the continued object 4 to be treated while leaving a space between them so that the longitudinal direction of the opening 11 becomes almost parallel to the extended direction of the object 4 to be treated and the opening 11 is moved along the surface 5 of the object 4 to be treated; and a second step of spraying a plasma-treated treating gas from the opening 11 of the plasma treatment head 10 toward the surface 5 of the object 4 to be treated while moving the object 4 to be treated to the extended direction of the object 4 to be treated relatively to the opening 11 of the plasma treatment head 10. <P>COPYRIGHT: (C)2007,JPO&INPIT
申请公布号 JP2007111677(A) 申请公布日期 2007.05.10
申请号 JP20050308368 申请日期 2005.10.24
申请人 SEKISUI CHEM CO LTD 发明人 IWANE KAZUYOSHI
分类号 B01J19/08;C23C16/02;H05H1/24 主分类号 B01J19/08
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