| 摘要 |
PROBLEM TO BE SOLVED: To reduce measurement errors due to harmonics contained in distorted lattice images, by projecting a stationary binary pattern to an object to be measured. SOLUTION: A three-dimensional measuring system is provided with an imaging device 350 for imaging a plurality of distorted lattice images formed by the projection of the binary pattern to the object to be measured, while making the binary pattern move; an approximation part 310 for making each light intensity distribution of the plurality of distorted lattice images approximating a cosine curve; a phase extraction part 413 for extracting a distorted lattice phase, provided for each of the plurality of distorted lattice images by the object to be measured from the approximate light intensity distribution; and a height computation part 316 for computing the height of the object to be measured, on the basis of the distorted lattice phase. COPYRIGHT: (C)2007,JPO&INPIT
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