| 摘要 |
PROBLEM TO BE SOLVED: To provide a workpiece cleaning apparatus which can diminish the size of an arrangement space. SOLUTION: The workpiece cleaning apparatus has a cleaning liquid tank 14 storing a cleaning liquid, an elevating body 17 to be moved inside and outside the cleaning liquid tank 14, and shutter apparatus 34, 36 which are arranged in the elevating body 17, also receives a workpiece to be transported from the previous step, and also workpieces so that the workpiece can be discharged to the following step. The elevating body 17 having the shutter apparatus 34, 36 is structured to be made to move inside and outside the cleaning liquid tank 14 so that the size of the arrangement space can be diminished compared with a conventional conveyer type. COPYRIGHT: (C)2007,JPO&INPIT
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