| 发明名称 |
VIBRATION ISOLATION MECHANISM FOR ARTICLE RECEIVING CONTAINER |
| 摘要 |
<p>Transmission of vibration to a shelf member is suppressed to prevent damage to a substrate supported on the shelf member. A FOUP (3) body and the shelf member (3e) provided at the FOUP (3) body are constructed from separate members. An elastic body (3g) is interposed between the FOUP (3) body and the shelf member (3e) so that the shelf member (3e) is elastically supported relative to the FOUP (3) body.</p> |
| 申请公布号 |
WO2007052672(A1) |
申请公布日期 |
2007.05.10 |
| 申请号 |
WO2006JP321779 |
申请日期 |
2006.10.31 |
| 申请人 |
ASYST SHINKO, INC.;MURATA, MASANAO |
发明人 |
MURATA, MASANAO |
| 分类号 |
H01L21/673;B65D85/86 |
主分类号 |
H01L21/673 |
| 代理机构 |
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代理人 |
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| 主权项 |
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