| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To improve the efficiency of removal of particles on a board to be treated, with a shock wave. <P>SOLUTION: A shock wave is generated and converted into a translational shock wave 13 by using a shock wave reflection mechanism 4. The translational shock wave irradiates a particle 12 adhering to the board 6 to be treated to remove the particle 12. <P>COPYRIGHT: (C)2007,JPO&INPIT</p> |
