发明名称 MANUFACTURING METHOD FOR SEMICONDUCTOR-ELEMENT MOUNTING PACKAGE SUBSTRATE
摘要 PROBLEM TO BE SOLVED: To provide a manufacturing method for a semiconductor-element mounting package substrate whereby the formation of its IVH is made easy, and its connecting reliability is made excellent. SOLUTION: The manufacturing method for a semiconductor-element mounting package substrate has a process for forming an unpierced connecting hole. In this method, copper foil subjected to no roughening is so used on the surface of a copper clad laminate used in the semiconductor-element mounting package substrate which is opposed to its prepreg, as to reflect easily a laser beam by the surface when performing laser machining, and as to remove easily resin residues by preventing a connecting hole from piercing through the laminate. COPYRIGHT: (C)2007,JPO&INPIT
申请公布号 JP2007115966(A) 申请公布日期 2007.05.10
申请号 JP20050307057 申请日期 2005.10.21
申请人 HITACHI CHEM CO LTD 发明人 TANABE TAKAHIRO;KUMAKURA YOSHITOSHI;ONOZEKI HITOSHI;OGAWA NOBUYUKI
分类号 H01L23/14;H01L23/12 主分类号 H01L23/14
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