发明名称 |
Method for pre-treating epitaxial layer, method for evaluating epitaxial layer, and apparatus for evaluating epitaxial layer |
摘要 |
A method for pre-treating an epitaxial layer performed before evaluation of the epitaxial layer by making the epitaxial layer contact with a metal electrode by a capacitance-voltage measurement, the method comprising; applying carbon-bearing compound to a surface of the epitaxial layer; subsequently irradiating ultraviolet light to the surface of the epitaxial layer; and thereby forming an oxide film on the surface of the epitaxial layer.
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申请公布号 |
US2007105344(A1) |
申请公布日期 |
2007.05.10 |
申请号 |
US20060595321 |
申请日期 |
2006.11.10 |
申请人 |
SUMCO CORPORATION |
发明人 |
UCHIDA SHINJIROU;MIYAZAKI SUMIO |
分类号 |
H01L21/30 |
主分类号 |
H01L21/30 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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