| 摘要 |
PROBLEM TO BE SOLVED: To provide a manufacturing method of a magnetostrictive torque sensor capable of confining the sensitivity variation of a magnetostrictive film to be within a desired range, when a magnetostrictive material plated section is to be high-frequency heated for imparting magnetic anisotropy. SOLUTION: In this manufacturing method of a magnetostrictive torque sensor, a magnetic anisotropy providing process P2 comprises a coil installation process of installing an induction heating coil 101 around the magnetostrictive material plated section; a heating processes S301 and S302 of supplying high-frequency current to the induction heating coil from an induction heating power supply 121 to induction-heat it, in a state of the torsional torque being applied to a rotating shaft, a process S303 of measuring the current value of grid current of a high-frequency oscillation circuit 125 of the induction heating power supply, an arithmetic process S304 of calculating the integrated value of the N-th power of the current value of the grid current, stopping processes S305 and S306 of stopping the supply of the high-frequency current to stop the induction heating, when the integrated value reaches a predetermined value, and a release process of releasing the torsional torque. COPYRIGHT: (C)2007,JPO&INPIT |
