| 摘要 |
PROBLEM TO BE SOLVED: To provide a multifunctional probe which is adequately available for observation and cutting operations, allows the operator to observe a machining object formed on a sample surface during the observation, and allows the operator to minutely machine only a desired area on a nano-scale during the cutting operations, and to provide a microfabrication device and a microfabrication method. SOLUTION: The multifunctional probe 2 is formed of: a cantilever 10 which is arranged so as to be opposed to the sample surface S1; and a probe portion 13 having a machining probe portion 11 and an observation probe portion 12 which are formed of materials different in hardness, and protrude by the same length from the tip of the cantilever 10 in a mutual opposition and adjacency. The observation probe portion 12 is formed of the material softer than that of the machining probe portion 11 so that the distal end may have a flat surface 12a in parallel with the sample surface S1. COPYRIGHT: (C)2007,JPO&INPIT
|
