| 发明名称 |
Cleaning sheets, transfer member having cleaning function, and method of cleaning substrate-processing apparatus with these |
| 摘要 |
A cleaning sheet which comprises a porous layer as a cleaning layer; or a cleaning sheet which comprises a sheet material having a porous layer and, formed on one side of the sheet material, an adhesive layer.
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| 申请公布号 |
US2007104939(A1) |
申请公布日期 |
2007.05.10 |
| 申请号 |
US20060643774 |
申请日期 |
2006.12.22 |
| 申请人 |
NITTO DENKO CORPORATION |
发明人 |
NAMIKAWA MAKOTO;TERADA YOSHIO;NUKAGA JIROU |
| 分类号 |
B32B3/26;B08B1/00;B08B7/00;B32B3/00;B32B7/12;C11D17/04;G11B23/50;H01L21/68;H05K3/26 |
主分类号 |
B32B3/26 |
| 代理机构 |
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代理人 |
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