| 摘要 |
An optical switching component comprises a rotor with a reflective top surface pivotally mounted within a stator, and a piezoelectric actuator set between the rotor and the stator to move the rotor about the pivot point. A controller can also be joined to the piezoelectric actuator to effectuate actuation thereof. Two light ports can also be set proximate to the reflective top surface such that a beam of light emitted from one is reflected to the other. Multiple optical switching components can be arranged to form an optical switching device. Optical switching components and devices can be fabricated according to conventional microfabrication practices including film deposition, planarization, and photolithography techniques.
|
