| 摘要 |
PROBLEM TO BE SOLVED: To provide a capacitive pressure sensor which is hardly affected by parasitic capacitance in pressure measurement and provide its manufacturing method. SOLUTION: A pressure sensor chip is provided with a pressure-sensitive-side fixed electrode 110; a pressure-sensitive-side movable electrode 210; a reference-side fixed electrode 120; and a reference-side movable electrode 220. A pad 111 for removing the pressure-sensitive-side fixed electrode; a pad 211 for removing the pressure-sensitive-side movable electrode; a pad 121 for removing the reference-side fixed electrode; and a pad 221 for removing the reference-side movable electrode are each formed in the outside surface of the pressure sensor chip. At least two pads for removing electrodes are formed in such a shape as to approximately eliminate a parasitic capacitance difference which occurs between at least any two electrode terminals among electrode terminals. COPYRIGHT: (C)2007,JPO&INPIT
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