发明名称 Method of forming a conductive pattern on dielectric substrates
摘要 To form a conductive pattern on dielectric substrates, a method is proposed in which a) a substrate covered with a metal film is coated with a protective layer which is formed by treating the metal film with a solution which contains at least one compound containing nitrogen, b) the protective layer is stripped away by UV radiation at least partially in the regions which do not correspond to the conductive pattern to be formed, in such a way that the metal film is exposed, and c) the exposed metal film is then removed by etching. By means of this method, extremely fine conductive patterns can be manufactured in a reproducible manner on dielectric substrates.
申请公布号 US6806034(B1) 申请公布日期 2004.10.19
申请号 US20020069417 申请日期 2002.02.25
申请人 ATOTECH DEUTSCHLAND GMBH 发明人 GUGGEMOS MICHAEL;KOHNLE FRANZ
分类号 C25D9/02;C23F1/00;C23F1/02;H05K3/00;H05K3/06;(IPC1-7):G03F7/26 主分类号 C25D9/02
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