发明名称 CERIUM POLISHING AGENT
摘要 <p>Disclosed is a high-purity cerium polishing agent having a high cerium oxide content, which is improved in polishing rate. Specifically disclosed is a cerium polishing agent wherein the cerium oxide content relative to the total rare earth oxide (TREO) is not less than 90% by mass. This cerium polishing agent is characterized in that at least one specific element selected from the group consisting of Ti and group 5-12 elements having an atomic number of 80 or less is contained in an amount of 0.01-2.0% by mass relative to the total mass of the polishing agent.</p>
申请公布号 WO2007052555(A1) 申请公布日期 2007.05.10
申请号 WO2006JP321508 申请日期 2006.10.27
申请人 MITSUI MINING & SMELTING CO., LTD.;URYU, HIROMI;UCHINO, YOSHITSUGU 发明人 URYU, HIROMI;UCHINO, YOSHITSUGU
分类号 C09K3/14;B24B37/00 主分类号 C09K3/14
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