,申请号JP20020244307-传众专利搜索

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发明名称
摘要
申请公布号	JP3913640(B2)	申请公布日期	2007.05.09
申请号	JP20020244307	申请日期	2002.08.23
申请人		发明人
分类号	H05B3/20;C04B37/00;C23C16/46;H01L21/205;H05B3/10;H05B3/18;H05B3/74	主分类号	H05B3/20
代理机构		代理人
主权项
地址

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