Position detection based on two-directional correlation

摘要

A method of determining position information, the method comprising detecting -along a first direction (102) - a value of a geometry parameter (103) related to a structure (104, 105) formed on and/or in a substrate (106), and determining - with regard to a second direction (108) - a value of a position parameter based on the detected value of the geometry parameter (103) and a predetermined relationship between the geometry parameter (103) and the position parameter.