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发明名称
METHOD FOR FABRICATING CRYSTALLINE SILICON
摘要
The present invention provides methods of manufacturing of silicon in substantially crystalline form out of amorphous silicon.
申请公布号
EP1782459(A2)
申请公布日期
2007.05.09
申请号
EP20040810047
申请日期
2004.10.26
申请人
CALIFORNIA INSTITUTE OF TECHNOLOGY
发明人
RICHARDSON, CHRISTINE, E.;ATWATER, HARRY, A.
分类号
H01L21/335;H01L21/00;H01L21/12;H01L21/36;H01L21/76;H01L21/84
主分类号
H01L21/335
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