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发明名称
METHOD AND DEVICE FOR MEASURING WAFER POTENTIAL OR TEMPERATURE
摘要
申请公布号
EP1515363(A4)
申请公布日期
2007.05.09
申请号
EP20030733471
申请日期
2003.06.17
申请人
MITSUBISHI HEAVY INDUSTRIES, LTD.
发明人
MATSUDA, RYUICHI;KAWANO, YUICHI;INOUE, MASAHIKO
分类号
H01L21/00;H01L21/683;(IPC1-7):H01L21/66
主分类号
H01L21/00
代理机构
代理人
主权项
地址
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