Ferroelectric film and method of manufacturing the same,申请号EP20050028009-传众专利搜索

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发明名称	Ferroelectric film and method of manufacturing the same
摘要
申请公布号	EP1675163(A3)	申请公布日期	2007.05.09
申请号	EP20050028009	申请日期	2005.12.21
申请人	SEIKO EPSON CORPORATION	发明人	KIJIMA, TAKESHI;HAMADA, YASUAKI;KOBAYASHI, TOMOKAZU
分类号	H01L21/316;C04B35/495;H01L21/8246;H01L27/115	主分类号	H01L21/316
代理机构		代理人
主权项
地址

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