| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide coating equipment and a coating method which form a coating film in which coating film component is uniformly dispersed, and uniform distribution is obtained by relieving or resolving uneven distribution of resist component, thereby restraining generation of roughness of a side wall of a resist pattern. <P>SOLUTION: In the coating equipment, an ultrasonic wave oscillation part is installed in a coating liquid feeding-passage or a coating liquid nozzle. When the coating liquid is not spouted from the coating liquid nozzle, e.g. when the nozzle is standing by in a nozzle bus, or just before spouting is performed at an upper position of a substrate, the oscillation part is oscillated and the coating liquid is vibrated. As another solution, many shearing members are arranged, e.g. in the coating liquid feeding-passage, and the coating liquid is stirred by shearing when the liquid passes. <P>COPYRIGHT: (C)2004,JPO&NCIPI |
