发明名称 |
Corrector for the correction of chromatic aberrations in a particle-optical apparatus |
摘要 |
The invention describes a corrector for the correction of chromatic aberrations in a particle lens, such as used in a SEM or a TEM. So as to reduce the stability demands on the power supplies of such a corrector, the energy with which the particle beam passes through the corrector is lower than the energy with which the beam passes through the lens to be corrected. |
申请公布号 |
EP1783811(A2) |
申请公布日期 |
2007.05.09 |
申请号 |
EP20050111064 |
申请日期 |
2005.11.22 |
申请人 |
FEI COMPANY |
发明人 |
HENSTRA, ALEXANDER;SCHEINFEIN, MICHAEL R. |
分类号 |
H01J37/153;H01J37/26 |
主分类号 |
H01J37/153 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|