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发明名称
摘要
申请公布号
JP3911943(B2)
申请公布日期
2007.05.09
申请号
JP20000003943
申请日期
2000.01.12
申请人
发明人
分类号
B06B1/06;H03H9/19;H01L21/302;H01L21/3065;H01L41/09;H03H3/04;H03H9/02
主分类号
B06B1/06
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代理人
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