发明名称 PROCESS FOR PRODUCING IC CHIP
摘要 It is an object of the invention to provide a method for producing an IC chip capable of producing an IC chip with a thickness as extremely thin as 50 µm or thinner, for example, about 25 to 30 µm at a high productivity. The invention is a method for producing an IC chip, which comprises; at least a step 1 of fixing a wafer in a support plate by sticking the wafer to the gas generating agent-containing face of a pressure sensitive adhesive double-faced tape having a pressure sensitive adhesive layer containing a gas generating agent for generating a gas by light radiation in at least one face; a step 2 of grinding the wafer in a state of being fixed in the support plate through the pressure sensitive adhesive double-faced tape; a step 3 of radiating light to the pressure sensitive adhesive double-faced tape; and a step 4 of separating the pressure sensitive adhesive double-faced tape from the wafer, a gas releasing speed from the pressure sensitive adhesive double-faced tape being 5 L/cm 2 ·min or higher in the step 3.
申请公布号 EP1783820(A1) 申请公布日期 2007.05.09
申请号 EP20040748190 申请日期 2004.08.02
申请人 SEKISUI CHEMICAL CO., LTD. 发明人 HATAI, MUNEHIRO;HAYASHI, SATOSHI;FUKUOKA, MASATERU;DANJO, SHIGERU;OYAMA, YASUHIKO;SHIMOMURA, KAZUHIRO;SUGITA, DAIHEI;KITAJIMA, YOSHIKAZU
分类号 H01L21/02;C09J5/00;C09J7/02;C09J201/00;H01L21/68 主分类号 H01L21/02
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