PROCESS FOR MANUFACTURING AN EVAPORATION SOURCE

摘要

13 The invention relates to a process for manufacturing an evaporation source f or physical vapour deposition. The evaporation source comprises the actual sputtering target with an aluminium component and one or more further components as wel l as a backing plate made from a material having better thermal conductivity than the target. According to the invention the backing plate made of a powdery starting material is pressed, together with the powdery components of the sputtering target, into sandwiched powder fractions and then formed.