| 摘要 |
An electrostatic actuator includes a waveform output register which generates waveform data having a drive time and a drive pattern on the basis of an operation request from the outside and has queues 0 and 1 to 3 holding the waveform data, a waveform data management unit which erases the waveform data held in the queue 0 of the waveform output register after the drive time has elapsed and moves the waveform data held in the queues 1 to 3 to the queue 0 , an output waveform generation unit which generates a corresponding waveform signal on the basis of the drive pattern held in the queue 0 of the waveform output register, and a switching circuit which converts the inputted drive pattern into voltage to electrode substrate.
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