发明名称 Semiconductor device and semiconductor integrated circuit device
摘要 Soft-error resistance and latch up resistance are simultaneously improved for LSI involving miniaturization and reducing operating voltage. P wells and N wells are formed in a higher density substrate (P on P+ substrate), and buried N wells are formed on a layer underlying thereof. A PMOSFET is formed in the N well and a NMOSFET is formed in the P well. A P well electric potential junction for coupling P well electric potential of the P well to predetermined electric potential is provided, and a region directly under the P well electric potential junction is provided with a region where the aforementioned buried N well is not disposed. The soft-error resistance is improved by having the buried N well therein, and the latch up resistance is improved by coupling the P well to the substrate.
申请公布号 US7214989(B2) 申请公布日期 2007.05.08
申请号 US20040975956 申请日期 2004.10.29
申请人 NEC ELECTRONICS CORPORATION 发明人 USHIRODA MASARU;FURUTA HIROSHI
分类号 H01L27/04;H01L29/94;H01L21/822;H01L21/8238;H01L21/8239;H01L21/8244;H01L27/08;H01L27/092;H01L27/10;H01L27/105;H01L27/11;H01L29/76 主分类号 H01L27/04
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