| 摘要 |
Disclosed is an image processing system for analyzing images of a specimen to determine whether the specimen contains defects. The system includes a plurality of processors for receiving image data from a specimen and for analyzing one or more selected patch(es) of such image data to determine whether the specimen has a defect. The system also includes a plurality of buses for coupling the processors together, wherein the bus has the following specifications: a data rate of about 50 gigabits per second or more and an error rate less than about 10<SUP>-16</SUP>. In one implementation, the buses are low voltage differential signal type buses, and in another implementation, the buses are hyper transport type buses.
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