| 摘要 |
Provided is an aerosol manufacture facility including an aerosol generator ( 600 ), an aerosol heater ( 604 ), an aerosol cooler ( 604 ), a particle collector ( 606 ), a precursor liquid supply system ( 608 ), a carrier gas supply system ( 610 ), and a cooling gas supply system ( 612 ), and optionally other components. Also provided is an aerosol method for manufacturing particles in the aerosol manufacture facility, which, in one embodiment, involves automated process control.
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