发明名称 Method and device for generating an activated gas curtain for surface treatment
摘要 The invention relates to a surface treatment device comprising: electrodes ( 24 a, 24 b) that are used to initiate an electric arc of stabilised plasma ( 14 ); a stabilising channel ( 12 ) which is disposed in a body ( 10 ) in order to confine the electric arc of stabilised plasma; conduits ( 38, 39 ) which are disposed in the body and used to introduce a treatment gas Q<SUB>1</SUB>, uniformly distributed along the arc, upstream of the arc in a direction that is essentially perpendicular to axis A of said arc in such a way as to form an activated gas curtain ( 8 ); means for introducing a complementary treatment gas Q<SUB>2 </SUB>downstream of the electric arc; and a support ( 28 ) that is used to hold the object or material to be treated in place and to position the object or material surface to be treated in relation to the body ( 10 ).
申请公布号 US7214413(B2) 申请公布日期 2007.05.08
申请号 US20030474669 申请日期 2003.10.14
申请人 APIT CORP. S.A. 发明人 KOULIK PAVEL;SAMSONOV MIKHAIL;EVGUENIA ZORINA
分类号 B05D3/14;H05H1/48;B23K9/073;B23K9/18;H01L21/3065;H01L21/31;H01L21/316;H05H1/24;H05H1/32 主分类号 B05D3/14
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