APPARATUS FOR COOLING WAFER,申请号KR20050104475-传众专利搜索

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发明名称	APPARATUS FOR COOLING WAFER
摘要
申请公布号	KR20070047586(A)	申请公布日期	2007.05.07
申请号	KR20050104475	申请日期	2005.11.02
申请人	SAMSUNG ELECTRONICS CO., LTD.	发明人	HAM, KYU HWAN
分类号	H01L21/324;H01L21/68	主分类号	H01L21/324
代理机构		代理人
主权项
地址

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