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发明名称
METHOD OF FORMING A GATE STACK AND METHOD OF MANUFACTURING A SEMICONDUCTOR DEVICE USING THE SAME
摘要
申请公布号
KR20070047399(A)
申请公布日期
2007.05.07
申请号
KR20050104087
申请日期
2005.11.02
申请人
SAMSUNG ELECTRONICS CO., LTD.
发明人
PARK, JAE HWA;KIM, BYUNG HEE;PARK, HEE SOOK;LEE, JANG HEE
分类号
H01L21/283
主分类号
H01L21/283
代理机构
代理人
主权项
地址
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